Silicides and Germanides III

01 June 2023
M - Materials engineering for advanced semiconductor devices M15 15:00 > 16:00 Silicides and Germanides III Schuman (1st floor) M - Materials engineering for advanced semiconductor devices

15:00 2154 Tuning nickel silicide properties via ion implantation: the role of defects and impurities > A. André VANTOMME (Leuven) 15:30 898 Formation of the C54-TiSi2 phase using nanosecond laser annealing and RTA enhanced by amorphous silicon > R. Reda GUELLADRESS (Crolles) 15:45 614 Influence of the Si surface preparation on CoSi2 agglomeration > A. Andréa NEWMAN (Marseille)

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