Substrate Technologies and Layer Synthesis I

Monday, May 29, 2023
M - Materials engineering for advanced semiconductor devices M03 1:30 PM > 3:00 PM Substrate Technologies and Layer Synthesis I Schuman (1st floor) M - Materials engineering for advanced semiconductor devices

1:30 PM 188 New Substrate Materials for Advanced Electronic Devices > I. Ionut RADU (Bernin) 2:00 PM 198 Low temperature epitaxial SiGe:P for gate-all-around(GAA) nMOS devices > Y. Yuta FUJIMOTO (Leuven) 2:15 PM 622 Deposition of Zr0.05Sn0.95O2 Thin Film using Mist Chemical Vapor Deposition and Its Application to Thin-Film Transistor > M-Y. Meng-Yu HSU (Kaohsiung City) 2:30 PM 1129 CVD-Growth of Tellurium-Based 2D Materials > S. Sara GHOMI (Agrate Brianza (Mb)) 2:45 PM 360 Direct growth of wafer-scale self-separated GaN on reusable two-dimensional material substrate > C-H. Chang-Hsun HUANG (Taipei)

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